Electronbeam evaporator - NaMiFab Core Facility

An electronbeam evaporator is a basic tool in cleanrooms for fabrication of electronic and photonic chips. This equipment allows to deposit thin films of different types of materials via the process of Physics Vapour Deposition (PVD). This is a very pure method that works in high-vacuüm, in contrast to e.g. chemical methods such as CVD or ALD and has the advantage that it does not contaminate the layers below. Because of the electronbeam materials can be evaporated with very high evaporation temperature, such as metals (platinum, titanium, ...) and oxides (tantalumoxide, titaniumoxide, ...) necessary for different applications in electronics and photonics. A typical cleanroom in universities or research institutes has multiple electronbeam evaporators available. This proposal is for the replacement of an existing tool that is now more than 40 years old. It will operate in the NaMiFab Core Facility.