A flexible atomic layer depostition reactor for structural control over matter at the nanometer scale (REACTOR)

Nanotechnology has become a cornerstone of materials science. Not only have existing materials been miniaturized (e.g. through nanoparticle synthesis), the unique properties of nanostructured materials open up opportunities to push the technological envelope in a wide range of applications. Atomic layer deposition (ALD) is one of very few tools able structure matter at the (sub-)nanometer scale, by the stepwise deposition of reactive molecules. By enabling access to a flexible ALD tool for researchers with different backgrounds, we target a broad scope of real-world applications that all result from chemistry at the (sub-)nanometer scale. These application areas include biocompatible coatings for implants, better batteries and gas sensors, the separation and valorization of CO2 and more efficient lighting.