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Publication

Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma

Journal Contribution - Journal Article

Journal: JOURNAL OF PHYSICAL CHEMISTRY C

ISSN: 1932-7455

Issue: 50

Volume: 124

Pages: 27829 - 27839

Publication year:2020

WoS Id: 000608876900058
DOI: https://doi.org/10.1021/acs.jpcc.0c09284
Handle: http://hdl.handle.net/1854/LU-8688852

Accessibility:Open