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Publication
Nanomechanical characterization of organic surface passivation films on 50 nm patterns during area-selective deposition
Journal Contribution - Journal Article
Journal: ACS Applied Electronic Materials
ISSN: 2637-6113
Issue: 6
Volume: 3
Pages: 2622 - 2630
Publication year:2021
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:2
CSS-citation score:1
Authors from:Government, Higher Education
Accessibility:Closed