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Large area capacitive MEMS for flexible electronics

The purpose of this PhD is to design, process and characterize capacitive MEMS in the Large Area Electronics platform, capable of forming 2D sensing and actuation arrays. Key challenges to be addressed are the development of efficient capacitive devices with thin-film technologies reaching state-of-the-art signal to noise ratio at the individual element.

Date:20 Aug 2020 →  Today
Keywords:MEMS, Transducer, Actuator, Sensor, Flexible electronics, Capacitive, Ultrasound imaging
Disciplines:Micro- and nanoelectromechanical systems
Project type:PhD project