B budget True Atom (True atom probe tomography for semiconductor) 2020. University of Antwerp
Atom probe tomography is an analysis tool in materials science that allows to inspect the 3D chemical composition of needle shaped samples at the nano scale. The method works by field-induced evaporation. Ions are then consecutively emitted from the apex of the needle and are absorbed by a position sensitive detector. The result is a tomographic, atomically resolved image of the evaporated volume, represented as a point cloud in which each point ...