Thin film transistor chemical sensors based on metal-organic frameworks KU Leuven
Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the (sub)nanometer range. Due to their tailorable adsorption properties, MOFs have the potential to enable highly sensitive and selective gas sensing. To this end, MOFs will need to be integrated in the fabrication flow of microelectronic sensors. Typical MOF film deposition methods, however, do not allow for such integration as they result in contamination ...