In-situ investigation of novel approaches for the conformal deposition of complex oxides by combining ALD with solid-state and electrochemical reactions Ghent University
We investigate the synthesis of conformal films of
complex oxides by combining atomic layer deposition with solid-state and
electrochemical reactions. Additionally, we study the structural and/or
phase changes during these reactions using in-situ methods such as X-ray
diffraction and ellipsometry.