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Deducing the apparent flat-band position Vafb and the doping level of large area single layer graphene MOS capacitors

Tijdschriftbijdrage - Tijdschriftartikel

© 2015 Elsevier B.V. All rights reserved. A capacitance-voltage (CV) study on large area CVD single layer graphene MOS capacitors has been carried out. The CV features are carefully examined to reveal the electronic origins of the observed frequency and bias dependence. In this study we investigate the frequency dispersion, propose the definition and extraction of the apparent flat-band Vafb, and finally perform the low temperature CV measurement to deduce the doping level of the graphene MOSCAPs.
Tijdschrift: MICROELECTRONIC ENGINEERING
ISSN: 0167-9317
Volume: 147
Pagina's: 314 - 317
Jaar van publicatie:2015
BOF-keylabel:ja
IOF-keylabel:ja
BOF-publication weight:1
CSS-citation score:1
Authors from:Government, Higher Education
Toegankelijkheid:Closed