Determining the random measurement errors of a novel moving-scale measurement system with nanometre uncertainty

This paper describes a setup with a low sensitivity to temperature variations for determining the random measurement errors of a measurement system applying a moving scale. This moving-scale system is developed for advanced equipment such as ultra-precision machine tools and should operate with a measurement uncertainty of 15 nm for a measurement length of 109 mm and temperature variations of 1°C. Temperature drift is identified as the most contributing source of errors and therefore should be accurately determined. A dedicated setup has been designed for this task.

ISBN:978-0-9566790-2-4

Jaar van publicatie:2013

Toegankelijkheid:Closed