Method for aligning micro-electronic components using an alignment liquid and electrostatic alignment as well as corresponding assembly of aligned micro-electronic components

According to the invention, alignment of a first micro-electronic component (3) to a receiving surface of a second micro-electronic component (1) is realised by a capillary force-induced self-alignment, combined with an electrostatic alignment. The latter is accomplished by providing at least one first electrical conductor line (6, 7, 16) along the periphery of the first component (3), and at least one second electrical conductor (11, 15) along the periphery of the location on the receiving surface of the second component (1) onto which the first component (3) is to be placed. The contact areas (2, 4) surrounded by the conductor lines (6, 7, 11, 15, 16) are covered with a wetting layer (5). The electrical conductor lines (6, 7, 11, 15, 16) may be embedded in a strip of anti-wetting material (8, 12, 17, 18) that runs along said peripheries to create a wettability contrast. The wettability contrast is instrumental in maintaining a drop of alignment liquid (e.g. water) (33) between the contact areas (2, 4) so as to obtain self-alignment by capillary force. By applying appropriate charges on the conductor lines (6, 7, 15, 16)), electrostatic self-alignment is realized, which improves the alignment obtained through capillary force and maintains said alignment during evaporation of the liquid (33).

Octrooi-publicatienummer: EP2889900

Jaar aanvraag: 2019

Jaar toekenning: 2019

Jaar van publicatie: 2019

Status: Toegewezen

Technologiedomeinen: Audiovisuele technologie, Semiconductoren

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie KULeuven