Ultrasonic transducer array device

The present invention relates to an ultrasonic transducer multilayer structure, comprising: a semiconductor layer stack defining a diode, a micro-machined ultrasonic transducer, MUT, layer stack being electrically in series with said diode and comprising a first electrically conductive layer disposed at least partly on the diode, a cavity extending over a region comprising at least a portion of the semiconductor layer stack and the first electrically conductive layer, wherein the MUT layer stack comprises a membrane extending at least partly over said region. An ultrasonic transducer multilayer structure according to the invention may be used in a sensor apparatus for measuring at least one characteristic of an object, wherein the sensor apparatus is used for medical imaging, such as cardiac imaging, obstetrics, gynaecology, abdominal imaging, intravascular imaging, and mammography, or non-destructive testing (NDA), fingerprint sensors, range finders, gesture recognition, ultrasonic haptic feedback, ultrasonic communication or MEMs speakers.

Octrooi-publicatienummer: WO2022106637

Jaar aanvraag: 2021

Jaar toekenning: 2023

Jaar van publicatie: 2022

Status: Aangevraagd

Technologiedomeinen: Semiconductoren, Chemische ingenieurswetenschappen en techniek, Andere consumentengoederen

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie KULeuven