Publicaties
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Spectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperatures and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna delivery Universiteit Hasselt
A series of nanocrystalline diamond (NCD) films were deposited by a custom made microwave plasma enhanced chemical vapor deposition apparatus with linear antenna delivery at different substrate temperatures (520-600 degrees C) and pulsed plasma frequencies (2.7-14.3 kHz) in a hydrogen rich working gas mixture of H-2/CH4/CO2. Films were deposited onto naturally oxidized Si wafers pre-seeded with nanodiamond particles. Spectro-ellipsometry ...
Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature KU Leuven
Monolayer-thin WS2 with (0002) texture grows by chemical vapor deposition (CVD) from gas-phase precursors WF6 and H2S at a deposition temperature of 450 °C on 300 mm Si wafers covered with an amorphous Al2O3 starting surface. We investigate the growth and nucleation mechanism during the CVD process by analyzing the morphology of the WS2 crystals. The CVD process consists of two distinct growth regimes. During (i) the initial growth regime, a ...
A novel direct liquid injection low pressure chemical vapor deposition system (DLI-LPCVD) for the deposition of thin films KU Leuven
In this work, the use of a newly developed direct liquid injection low pressure chemical vapor deposition (DLI-LPCVD) system is described, which allows for the deposition of thin films in a controlled and reproducible manner. The capabilities of this system are described via silica thin films deposited using the precursor tetraethyl orthosilicate (TEOS). The deposition of thin films is controlled by parameters, such as deposition temperature, ...
Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions KU Leuven
Nanoparticles of different materials are already in use for many applications. In some applications, these nanoparticles need to be deposited on a substrate in a fast and reproducible way. We have developed a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using a liquid nanoparticle precursor. The system was designed to deposit nanoparticles in a controlled and reproducible way by using two direct ...
Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions KU Leuven
Nanoparticles of different materials are already in use for many applications. In some applications, these nanoparticles need to be deposited on a substrate in a fast and reproducible way. We have developed a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using a liquid nanoparticle precursor. The system was designed to deposit nanoparticles in a controlled and reproducible way by using two direct ...
Chemical and physical sputtering effects on the surface morphology of carbon films grown by plasma chemical vapor deposition KU Leuven
We have studied the influence of chemical and physical sputtering on the surface morphology of hydrogenated carbon films deposited on silicon substrates by bias-enhanced electron cyclotron resonance chemical vapor deposition. Atomic force microscopy based power spectrum density (PSD) and roughness analysis have been used to investigate the film morphology. This study has been possible due to the appropriate choice of the experimental variables, ...
Chemical Vapor Deposition of Ionic Liquids for the Fabrication of Ionogel Films and Patterns Vrije Universiteit Brussel KU Leuven
Film deposition and high-resolution patterning of ionic liquids (ILs) remain a challenge, despite a broad range of applications that would benefit from this type of processing. Here, we demonstrate for the first time the chemical vapor deposition (CVD) of ILs. The IL-CVD method is based on the formation of a non-volatile IL through the reaction of two vaporized precursors. Ionogel micropatterns can be easily obtained via the combination of ...